MEMS Flow Sensors

MEMSIC’s MEMS Flow Sensor's are designed to serve the needs of industries such as steel, chemical, food, beverage, natural gas network etc. for directly sensing the gas mass flow.

MEMSIC has a dedicated R&D team focusing on design and development of MEMS application systems in different areas. The new MEMS Gas Mass Flow meter product is a result of 5 years of research and development. This product has undergone the explosion-proof certification and associated production permission.

The MEMS mass-flow solution offers several advantages over traditional gas meters such as wide turn-down rate, direct mass flow sensing, high accuracy, very low power consumption, low pressure loss and extremely low flow sensitivity.

MEMSIC’s gas Mass-flow meter is based on patented thermal MEMS technology. With zero flow, the micro heater in the center of sensor generates a symmetric temperature profile and the gas mass flow on the surface will take away certain amount of heat so as to re-distribute the profile. Two temperature sensors are set on both sides of the heater, which will monitor the imbalance. As the flow velocity increases, the on-chip heater control system will keep the average value of both Temperature sensors constant and the differential value of both sensors will be filtered, amplified, and calibrated to indicate the accurate mass flow.